Global-in-time Spectral Duhamel-Picard Method for Post-Exposure Bake Simulation and Physics-Informed Neural Operators for EUV Lithography
physics.comp-ph, cs.LG, physics.app-ph
Submitted: 2026-10-13
Updated: 2026-10-13
Related papers
- Refining Machine Learning Potentials through Thermodynamic Theory of Phase Transitions
- Learning Spectrally Optimised Mesh-Free Discretisations
- chemtrain-deploy: A parallel and scalable framework for machine learning potentials in million-atom MD simulations
- Omnisolver: An extensible interface to Ising spin-glass and QUBO solvers: adding a distributed GPU brute-force plugin
- Breaking the Exascale Barrier for the Electronic Structure Problem in Ab-Initio Molecular Dynamics
- Aitomia: Your Intelligent Assistant for AI-Driven Atomistic and Quantum Chemical Simulations