Phase compositions of Si oxynitride: A comprehensive thermodynamic modeling study

arXiv:2609.34796 · cond-mat.mtrl-sci, cond-mat.mes-hall · Submitted 2026-09-28 · Read on arXiv

cond-mat.mtrl-sci, cond-mat.mes-hall

Submitted: 2026-09-28

Updated: 2026-09-28

Terminology

• Consistency — 3× in this paper · explained in 3 episodes
• Clustering — 2× in this paper · explained in 2 episodes
• Ab Initio — 1× in this paper · explained in 1 episode
• Homogeneity — 1× in this paper · explained in 2 episodes

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