VPEvolve: A Self-Evolving Virtual Process Engineer for Computational Lithography

arXiv:2609.32473 · cs.AI, cs.SE · Submitted 2026-09-26 · Read on arXiv

cs.AI, cs.SE

Submitted: 2026-09-26

Updated: 2026-09-26

Code: https://github.com/earendil-works/pi

Terminology

• Actor — 25× in this paper · explained in 3 episodes
• Benchmark — 10× in this paper · explained in 2 episodes
• Ablation — 9× in this paper · explained in 1 episode
• Bayesian Optimization — 8× in this paper · explained in 3 episodes
• Virtual Process Engineer — 7× in this paper
• Agent Harness — 5× in this paper · explained in 2 episodes
• Core — 4× in this paper · explained in 2 episodes
• Accuracy — 2× in this paper · explained in 1 episode
• Frozen model — 2× in this paper · explained in 3 episodes
• Reinforcement Learning — 2× in this paper · explained in 4 episodes
• Adam — 1× in this paper · explained in 2 episodes
• Adaptation — 1× in this paper · explained in 1 episode
• Generalization — 1× in this paper · explained in 13 episodes
• KV cache — 1× in this paper · explained in 3 episodes
• Large Language Models (LLMs) — 1× in this paper · explained in 6 episodes
• Parsimony — 1× in this paper · explained in 2 episodes

Sources

• DeepSeek-V4.1-Flash: Pushing the Limits of KV Cache Compression
• Gemma 4 Technical Report
• ChipNeMo: Domain-Adapted LLMs for Chip Design

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