Oxide-Nitride Heteroepitaxy for Low-Loss Dielectrics in Superconducting Quantum Circuits

arXiv:2603.29065 · quant-ph, cond-mat.mtrl-sci, cond-mat.supr-con · Submitted 2026-03-30 · Read on arXiv

quant-ph, cond-mat.mtrl-sci, cond-mat.supr-con

Submitted: 2026-03-30

Updated: 2026-09-22

Terminology

• Northwestern University — 19× in this paper
• Quantum Circuits — 5× in this paper · explained in 2 episodes
• Core — 3× in this paper · explained in 2 episodes
• Ablation — 2× in this paper · explained in 1 episode
• Analyzer — 2× in this paper · explained in 1 episode
• Aperture — 1× in this paper · explained in 1 episode
• Calibration — 1× in this paper · explained in 7 episodes
• Center for Applied Physics and Superconducting Technologies — 1× in this paper
• Fidelity — 1× in this paper · explained in 2 episodes
• International Institute of Nanotechnology — 1× in this paper
• Northwestern University Atomic and Nanoscale Characterization Experimental — 1× in this paper
• Superconducting Quantum Materials and Systems — 1× in this paper
• Trace — 1× in this paper · explained in 2 episodes

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