Oxygen as a dual function regulator in MoS2 CVD synthesis: enhancing precursor evaporation while modulating reaction kinetics

arXiv:2603.28461 · cond-mat.mtrl-sci, cond-mat.mes-hall · Submitted 2026-03-30 · Read on arXiv

cond-mat.mtrl-sci, cond-mat.mes-hall

Submitted: 2026-03-30

Updated: 2026-03-30

Comments: 42 pages, 6 main text and 11 supplementary figures

Journal ref: Small e75483 (2026)

DOI: 10.1002/smll.75483

License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/

Terminology

• Ab Initio — 8× in this paper · explained in 1 episode
• Optical Microscopy — 5× in this paper
• Density Functional Theory (DFT) — 4× in this paper · explained in 2 episodes
• DFT Calculations — 3× in this paper · explained in 2 episodes
• Benchmark — 1× in this paper · explained in 2 episodes
• Digital Twin — 1× in this paper · explained in 4 episodes

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